Work

A space charge high vacuum gauge

Year: 1966

Type: article

Source: Journal of Scientific Instruments

DOI: 10.1088/0950-7671/43/8/308

Authors: H H Atkinson, P H T Banks

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1987365518

FWCI: 0.775

Cites: 1

Cited by: 2

Related to: 10