Work

Effect of time-varying axial magnetic field on high aspect ratio contact hole etching

Year: 2003

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(03)00382-1

Authors: Ho-Young Song, Yong-Hee Choi, Beom-hoan O, Se-Geun Park, Jin-Sung Oh, Jin-Woong Kim

Institutions: Inha University, SK Group (United States)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Korea Science and Engineering Foundation

OpenAlex ID: W1987368286

FWCI:

Cites: 10

Cited by: 1

Related to: 10