Work

Fatigue life of a microcantilever beam in bending

Year: 2004

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.1821502

Authors: H. Hocheng, K. S. Kao, W. Fang

Institution: National Tsing Hua University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1987472007

FWCI: 0.633

Cites: 19

Cited by: 7

Related to: 10