Work

Measurement of boron and phosphorus concentration in silicon by low-temperature FTIR spectroscopy

Year: 2004

Type: article

Source: Applied Physics A

DOI: 10.1007/s00339-004-3032-0

Authors: M. Porrini, M.G. Pretto, R. Scala, A.V. Batunina, H.C. Alt, R. Wolf

Institutions: SunEdison (United States), SunEdison (Italy), Wacker Group (Germany)

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1987695331

FWCI:

Cites: 5

Cited by: 13

Related to: 10