Ion energy distributions in AZO magnetron sputtering from planar and rotatable magnetrons
Year: 2009
Type: article
Source: Surface and Coatings Technology
Authors: F. Richter, T. Welzel, R. Kleinhempel, T. Dunger, T. Knoth, M. Dimer, F. Milde
Institutions: Chemnitz University of Technology, Von Ardenne (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: European Commission
OpenAlex ID: W1989999686