Work

Mechanisms and kinetics of room-temperature silicon oxidation

Year: 1997

Type: article

Source: Journal of Non-Crystalline Solids

DOI: 10.1016/s0022-3093(97)00180-4

Authors: G.F. Cerofolini, L. Meda

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1990127429

FWCI: 0.481

Cites: 24

Cited by: 34

Related to: 10