Work

Possibility and current status of absolute XHV measurement by laser ionization

Year: 1996

Type: article

Source: Vacuum

DOI: 10.1016/0042-207x(96)00017-6

Authors: S Ichimura, K Kokubun, H Shimizu, S Sekine

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1990207365

FWCI: 1.398

Cites: 16

Cited by: 9

Related to: 10