An innovative Source-Mask co-Optimization (SMO) method for extending low k1 imaging
Year: 2008
Type: conference-paper
DOI: 10.1117/12.806657
Authors: Stephen Hsu, Luoqi Chen, Zhipan Li, Sean Park, Keith Gronlund, Hua-Yu Liu, Neal Callan, Robert Socha, Steve Hansen
Institution: ASML (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1990449692