12.2: Large‐Area Poly‐Si on Glass by UV Scan Heating
Year: 2002
Type: conference-paper
DOI: 10.1889/1.1830218
Institution: Kyung Hee University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1990454901
