Work

Tool-to-tool optical proximity effect matching

Year: 2008

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.772598

Authors: L. Van Look, Joost Bekaert, Peter De Bisschop, Jeroen Van de Kerkhove, Geert Vandenberghe, Koen Schreel, Jasper Menger, Guido Schiffelers, Edwin Knols, Rob Willekers

Institutions: IMEC, ASML (Netherlands)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1990704897

FWCI: 3.317

Cites: 8

Cited by: 14

Related to: 10