Work

Destruction of monocrystalline silicon with nanosecond pulsed fiber laser accompanied by the oxidation of ablation microparticles

Year: 2013

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2053272

Authors: V. P. Veiko, A. M. Skvortsov, C. T. Huynh, A. A. Petrov

Institution: ITMO University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Russian Foundation for Basic Research

OpenAlex ID: W1991850486

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Cites: 8

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Related to: 10