Work

Optical constants of silicone-like (Si:Ox:Cy:Hz) thin films deposited on quartz using hexamethyldisiloxane in a remote RF hollow cathode discharge plasma

Year: 2007

Type: article

Source: Vacuum

DOI: 10.1016/j.vacuum.2007.03.007

Authors: S. Saloum, M. Naddaf

Institution: Atomic Energy Commission of Syria

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1992422706

FWCI: 2.973

Cites: 24

Cited by: 29

Related to: 10