Work

Physical mechanism of silicon ablation with long nanosecond laser pulses at 1064nm through time-resolved observation

Year: 2010

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2010.10.086

Authors: Yun Zhou, Benxin Wu, Sha Tao, Andrew Forsman, Yibo Gao

Institutions: Illinois Institute of Technology, General Atomics (United States)

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1992906997

FWCI: 8.426

Cites: 23

Cited by: 47

Related to: 10