Method for Controlled Multicomponent Sputtering
Year: 1962
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/1.1717949
Authors: W. Robert Sinclair, F. G. Peters
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1992913461