Work

Influence of Substrate Temperature on Structural Properties and Deposition Rate of AlN Thin Film Deposited by Reactive Magnetron Sputtering

Year: 2012

Type: article

Source: Journal of Electronic Materials

DOI: 10.1007/s11664-012-1999-4

Authors: Hao Jin, Bin Feng, Shurong Dong, Changjian Zhou, Jian Zhou, Yi Yang, Tianling Ren, Jikui Luo, Demiao Wang

Institutions: Zhejiang University, Tsinghua University, University of Greater Manchester

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Engineering and Physical Sciences Research Council

Award: G2248076206

OpenAlex ID: W1993281237

FWCI: 2.792

Cites: 29

Cited by: 60

Related to: 10