Fabrication of monolithic bidirectional switch devices
Year: 2004
Type: article
Source: Microelectronic Engineering
Author: M BAUS
Institution: RWTH Aachen University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W1993588674