Post-Growth Laser Annealing for High-Performance Ge Photodiodes on Si
Year: 2014
Type: conference-paper
Source: ECS Transactions
Authors: Yuta Kawamata, Sho Nagatomo, Kotaro Fukuda, Yusaku Izawa, Satohiko Hoshino, Yasuhiko Ishikawa
Institutions: The University of Tokyo, Tokyo Electron (Japan)
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1993662235