Growth of diamond films on crystalline silicon by hot-filament chemical vapor deposition
Year: 2002
Type: article
Source: Semiconductors
DOI: 10.1134/1.1485657
Authors: M. V. Baidakova, A. Ya. Vul’, V. G. Golubev, S. A. Grudinkin, V. G. Melekhin, N. A. Feoktistov, A. Krüger
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1993854035