Work

Laser scanner for direct writing lithography

Year: 1989

Type: article

Source: Applied Optics

DOI: 10.1364/ao.28.003754

Authors: Clemens Rensch, Stefan Hell, Manfred v. Schickfus, Siegfried Hunklinger

Institution: Heidelberg University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1994069012

FWCI: 0.461

Cites: 5

Cited by: 53

Related to: 10