Work

Contamination Control in Ion Implantation

Year: 2011

Type: conference-paper

Source: AIP conference proceedings

DOI: 10.1063/1.3548431

Authors: R. Eddy, D. Doi, I. Santos, W. Wriggins, Jiro Matsuo, Masataka Kase, Takaaki Aoki, Toshio Seki

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1994131925

FWCI: 0.587

Cites: 3

Cited by: 7

Related to: 10