Work

Negative Ions in a Glow Discharge of Tetrafluoromethane

Year: 1985

Type: article

Source: Beiträge aus der Plasmaphysik

DOI: 10.1002/ctpp.19850250510

Authors: J. Meichsner, H. U. Poll, K. H. Wickleder

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1994233293

FWCI: 0.543

Cites: 13

Cited by: 8

Related to: 10