Work

The Patterning of Sub‐500 nm Inorganic Oxide Structures

Year: 2008

Type: article

Source: Advanced Materials

DOI: 10.1002/adma.200702495

Authors: Meredith J. Hampton, Stuart S. Williams, Zhilian Zhou, Janine Nunes, Doo‐Hyun Ko, Joseph L. Templeton, Edward T. Samulski, Joseph M. DeSimone

Institutions: University of North Carolina at Chapel Hill, Liquidia Technologies (United States), North Carolina State University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1994388564

FWCI: 8.839

Cites: 29

Cited by: 101

Related to: 10