Work

Ion implantation post-processing of amorphous carbon films

Year: 1999

Type: article

Source: Diamond and Related Materials

DOI: 10.1016/s0925-9635(98)00398-7

Authors: J.W Ager, S Anders, A Anders, B Wei, X.Y Yao, I.G Brown, C.S Bhatia, K Komvopoulos

Institutions: Lawrence Berkeley National Laboratory, University of California, Berkeley, IBM (United States)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1994593947

FWCI: 1.669

Cites: 21

Cited by: 13

Related to: 10