Work

Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor

Year: 1995

Type: article

Source: Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics

DOI: 10.1103/physreve.51.1376

Authors: J. P. Boeuf, L. C. Pitchford

Institutions: Joint Institute for Laboratory Astrophysics, University of Colorado Boulder

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: JILA, University of Colorado

OpenAlex ID: W1995006131

FWCI: 8.335

Cites: 64

Cited by: 324

Related to: 10