Formation of alumina fine particles by a magnetron sputtering — gas aggregation method
Year: 1997
Type: article
Authors: M. Goto, J. Murakami, Y. Tai, K. Yoshimura, K. Igarashi, S. Tanemura
Institution: Nagoya Industrial Science Research Institute
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1995195016