Work

Integrated Micro-Displacement Sensor that can Measure Tilting or Linear Motion for an External Mirror

Year: 2006

Type: conference-paper

Source: IEEE/LEOS International Conference on Optical MEMS

DOI: 10.1109/omems.2006.1708260

Authors: R. Sawada, E. Higurashi, S. Sanada, D. Chino, I. Ishikawa

Institutions: Kyushu University, Research Center for Advanced Science and Technology, The University of Tokyo, The University of Tokyo

Language: English

Topic: Semiconductor Lasers and Optical Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Institute of Advanced Industrial Science and Technology

OpenAlex ID: W1995213650

FWCI: 0.53

Cites: 1

Cited by: 3

Related to: 10