Epitaxial Silicon Oxynitride Layer on a 6H−SiC(0001) Surface
Year: 2007
Type: article
Source: Physical Review Letters
Authors: Tetsuroh Shirasawa, Kenjiro Hayashi, Seigi Mizuno, Satoru Tanaka, Kan Nakatsuji, Fumio Komori, Hiroshi Tochihara
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1995233124