Structural and microstructural characterization of nanocrystalline silicon thin films obtained by radio-frequency magnetron sputtering
Year: 2005
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.1841461
Authors: M. Morales, Y. Leconte, R. Rizk, Daniel Chateigner
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1995315324