Work

Impact of Research on Defects in Silicon on the Microelectronic Industry

Year: 2000

Type: article

Source: physica status solidi (b)

DOI: 10.1002/1521-3951(200011)222:1<5::aid-pssb5>3.0.co;2-l

Authors: W. Bergholz, D. Gilles

Institution: Infineon Technologies (Germany)

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1996629700

FWCI: 3.885

Cites: 31

Cited by: 30

Related to: 10