Work

Slightly negative surface potential and charging model of insulator in the negative-ion implantation

Year: 1997

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/s0168-583x(97)00072-4

Authors: Hiroshi Tsuji, Junzo Ishikawa, Shigeo Ikeda, Yasuhito Gotoh

Institution: Kyoto University

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1996907490

FWCI: 1.98

Cites: 8

Cited by: 43

Related to: 10