Work

Mounting of micromachined diamond tips and cantilevers

Year: 1999

Type: article

Abstract: Micromachined chemical vapour-deposited diamond tips are useful nanotools because of their high hardness, electrical conductivity and chemically inert nature. A technology is described to transfer pyramidal diamond tips on cantilevers to Pyrex substrates by anodic bonding in selected areas. This technology has been used to fabricate tips for individual handling and hybrid mounting on silicon cantilevers. Bond strengths have been quantified and the devices have been tested in a conducting atomic force microscopy experiment. Copyright © 1999 John Wiley & Sons, Ltd.

Source: Surface and Interface Analysis

DOI: 10.1002/(sici)1096-9918(199905/06)27:5/6<296::aid-sia497>3.0.co;2-e

Authors: Ph. Niedermann, W. Hänni, S. Thurre, M. Gjoni, A. Perret, N. Skinner, P.-F. Indermühle, U. Staufer, N. F. de Rooij

Institutions: Swiss Center for Electronics and Microtechnology (Switzerland), University of Neuchâtel

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W1997462525

FWCI: 2.111

Cites: 3

Cited by: 10

Related to: 10