Work

RF plasma sheath in an oblique magnetic field

Year: 2006

Type: article

Source: Vacuum

DOI: 10.1016/j.vacuum.2006.01.028

Authors: Jin-Yuan Liu, Fei Zhao, Xiu Zou, Yu Zhang, Yue Liu, Xiao-Gang Wang

Institutions: Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W1997474362

FWCI: 0.337

Cites: 10

Cited by: 8

Related to: 10