Work

Homogeneity characterization of a large microwave plasma

Year: 1997

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.580703

Authors: S. Béchu, C. Boisse-Laporte, P. Leprince, J. Marec

Institutions: Université Paris-Sud, Laboratoire de Physique des Gaz et des Plasmas

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997602849

FWCI: 2.885

Cites:

Cited by: 15

Related to: 10