Work

Plasma surface treatment of polymers with inductivity-coupled RF plasmas driven by low-inductance antenna units

Year: 2009

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2009.07.161

Authors: Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Akinori Ebe, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

Institutions: Japan Science and Technology Agency, Joining and Welding Research Institute, The University of Osaka, EMD Corporation (Japan), Kyushu University, Nagoya University, Japan Synchrotron Radiation Research Institute

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997602959

FWCI: 2.835

Cites: 25

Cited by: 24

Related to: 10