Work

Characteristics of fritting contacts utilized for micromachined wafer probe cards

Year: 2000

Type: article

Source: Review of Scientific Instruments

DOI: 10.1063/1.1150610

Authors: Toshihiro Itoh, Tadatomo Suga, Gunter Engelmann, Jürgen Wolf, Oswin Ehrmann, Herbert Reichl

Institutions: Research Center for Advanced Science and Technology, The University of Tokyo, The University of Tokyo, Fraunhofer Institute for Reliability and Microintegration

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997659837

FWCI: 2.594

Cites: 3

Cited by: 19

Related to: 10