Work

Characterization of particle contamination for optical application

Year: 2006

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.661621

Authors: I. Tovena, S. Palmier, S. Garcia, P. Manac'h, E. Sellier

Institutions: CEA CESTA, Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Instrumentation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997671323

FWCI:

Cites:

Cited by: 1

Related to: 10