Preparation of Pb(Zr0.52TiO0.48)O3 Thin Films at Low-Temperature of Less than 400°C by Hydrothermal Treatment Following Sol-Gel Deposition
Year: 2001
Type: article
Abstract: Sol-gel Pb(Zr0.52TiO0.48)O3 (PZT) thin films have been successfully crystallized at the low temperature of 160°C by hydrothermal treatment in various kinds of hydroxide (KOH, Pb(OH)2 and Sr(OH)2) solutions on Pt/Ti/SiO2/Si substrates with prebaking at 300°C. Hydrothermally treated PZT films in KOH+Pb(OH)2 solution show good crystallinity with pure perovskite phase and are oriented to (111). The films show granulated structure with grain size of about 100 nm. The sample after post-baking at 400°C shows good hysteresis loop with P r=26.3 µm/cm2 and E c=40.1 kV/cm. The leakage current density of the thin film after postbaking is about 5.78×10-8 A/cm2 at ±66 kV/cm (±2 V).
DOI: 10.1143/jjap.40.5539
Institution: The University of Osaka
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W1997828793