Work

3D AFM method for characterization of resist effect of aerial image contrast on side wall roughness

Year: 2013

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.2013657

Authors: Yong-ha Lee, Sang-Joon Cho, Sang-il Park, R. Ayothi, Y. Hishiro

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Innovative Research Group Project of the National Natural Science Foundation of China

OpenAlex ID: W1997868680

FWCI:

Cites: 5

Cited by: 1

Related to: 10