Work

Formation of surface structures on single-crystalline silicon under the action of nanosecond high-power ion beam pulses

Year: 2011

Type: article

Source: Technical Physics Letters

DOI: 10.1134/s1063785011120248

Authors: V. S. Kovivchak, T. V. Panova, O. V. Krivozubov, N. A. Davletkil’deev

Institutions: Russian Academy of Sciences, Omsk State University, Siberian Branch of the Russian Academy of Sciences

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1997929554

FWCI: 0.203

Cites: 3

Cited by: 3

Related to: 10