Work

Complex Nonlinear Oscillations in Electrostatically Actuated Microstructures

Year: 2006

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2006.872227

Authors: S.K. De, N.R. Aluru

Institution: University of Illinois Urbana-Champaign

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1998103010

FWCI: 7.875

Cites: 45

Cited by: 108

Related to: 10