Work

Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating

Year: 2011

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2011.01.075

Authors: Yanhui Zhao, Guoqiang Lin, Jinquan Xiao, Wenchang Lang, Chuang Dong, Jun Gong, Chao Sun

Institutions: Chinese Academy of Sciences, Institute of Metal Research, Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: 高质量超硬纳米多层薄膜的制备及其超硬效应研究

OpenAlex ID: W1998277791

FWCI: 1.605

Cites: 6

Cited by: 20

Related to: 10