Space and time resolved Langmuir probe measurements in a 100 kHz pulsed rectangular magnetron system
Year: 2001
Type: article
Source: Surface and Coatings Technology
Authors: J.W. Bradley, H. Bäcker, P.J. Kelly, R.D. Arnell
Institutions: University of Manchester, University of Salford
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W1998703554
