Work

Scanning and rotating micromirrors using thermal actuators

Year: 1997

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.277741

Authors: Jeffrey T. Butler, Victor M. Bright, J. Robert Reid

Institutions: U.S. Air Force Institute of Technology, Rome Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1998941908

FWCI: 10.26

Cites: 6

Cited by: 16

Related to: 10