The Research of Micromachined Gas Pendulum Accelerometer’s Structure
Year: 2010
Type: article
Abstract: With the micromachining technology, two perpendicular cavities are formed on a silicon substrate, and two thermistors whose resistances are equal are placed parallel in each cavity. The nature convention of the gas is produced by the thermistors which are used as both the heater and the sensitive element in the hermetic cavity, and the acceleration can be measured with the temperature difference sensed by the thermistors. At last the test about the sensor shows when the value of acceleration is at the range of ±7g, the non-linearity is less than 0.62%FS.
Source: Applied Mechanics and Materials
Authors: Qi Feng Zhao, Fu Xue Zhang, Wei Zhang, Ping Yue
Institution: Beijing Information Science & Technology University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W2000210164