The Research of Two-Dimension Micromachined Level Posture Sensor
Year: 2010
Type: article
Abstract: Two-dimension level posture sensor which can be sensitive to two vertical-directional tilt angle at one time is described. Adopt micro-machined technique two deep groove are corroded on the silicon plate, and two cantilever beams of metal heated hot wire is set up at each deep groove. Semicircle airtight space forms sense elements. Through two Wheatstone bridge, we get the tilt output voltage of x axis and y axis. To overcome environmental factors, a series of signal processing methods are proposed ,such as: zero temperature compensation, sensitive temperature compensation and linear compensation. The test about the sensor showed the sensor’s performance is as follow: resolution<0.05°,nonlinear<0.1%,the working temperature is enlarged.
Source: Advanced materials research
Authors: Lin Hua Piao, Yan Jie Li, Bai Hua Li, Ming Ming Ji, Xue Yan Zhang
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W2000296376