Experimental analysis of the thermal annealing of hard a-C:H films
Year: 2014
Type: article
Source: Diamond and Related Materials
Authors: S. Peter, M. Günther, O. Gordan, S. Berg, D.R.T. Zahn, T. Seyller
Institution: Chemnitz University of Technology
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W2000304948