Work

Deposition of silicon carbon nitride thin films by microwave ECR plasma enhanced unbalance magnetron sputtering

Year: 2006

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/j.surfcoat.2006.07.197

Authors: Peng Gao, Jun Xu, Yong Piao, Wanyu Ding, Dehe Wang, Xinlu Deng, Chuang Dong

Institutions: Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W2000306608

FWCI: 3.358

Cites: 25

Cited by: 49

Related to: 10