Work

Residual Stresses of Sputtering Titanium Thin Films at Various Substrate Temperatures

Year: 2010

Type: article

Source: Journal of Nanoscience and Nanotechnology

DOI: 10.1166/jnn.2010.1696

Authors: R. C. Chang, F. Y. Chen, C. T. Chuang, Y. C. Tung

Institution: St. John's University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000322802

FWCI: 1.627

Cites: 1

Cited by: 25

Related to: 10