Chemical treatment of getter films on wafers prior to vacuum packaging
Year: 2004
Type: conference-paper
DOI: 10.1117/12.525099
Authors: Marco Moraja, Marco Amiotti, Heather Florence
Institution: SAES Group (Italy)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2000372353