Thermal stability of thin PtSi films on silicon substrates
Year: 1972
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.1661781
Authors: A. K. Sinha, R. B. Marcus, T. T. Sheng, S. E. Haszko
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2000440161
